As semiconductor manufacturing technology advances, the demand for cutting-edge facility infrastructure continues to rise. The High-Tech Facility Pavilion highlights the critical infrastructure required for fab construction and operations. Featured solutions include cleanroom technologies, advanced cooling and gas systems, ultrapure water and wastewater treatment, and ESG-compliant facility innovations. This pavilion serves as a key platform for industry collaboration, showcasing smart facility, green manufacturing, and sustainable solutions that support the next-generation semiconductor fab ecosystem.