Dr. Tri-Rung Yew/ 游萃蓉

國立清華大學 材料工程學系 教授


  • Ph.D. Electronic Materials,  Massachusetts Institute of  Technology


  • CTO, Solar Applied Material Corp.
  • Professor, Dept. of Mat. Sci. and  Eng., NTHU
  • Technology VP,  Archers Inc.


Prof. T.R. Yew had worked as head of the Advanced Technology Development (ATD) at UMC focused on 14nm FinFET and beyond. She received her PhD degree from the department of Materials Science and Engineering at Massachusetts Institute of Technology (MIT) in 1990. She then joined Materials Science Center at National Tsing-Hua University (NTHU) to continue her research on low temperature Si epitaxial growth and poly-Si on SiO2 by PECVD. In 1995, she joined United Microelectronics Corporation (UMC) in the R&D division for the technology development of advanced modules and process integration, covering the technology nodes from 0.25um to 65nm and beyond. She was a deputy director at Central R&D division when she left UMC in 2003.

To integrate her industrial experience with academic research and teaching, she joined the department of Materials Science and Engineering at NTHU in 2004, as an associate professor. During 2008-2009, she took a year leave to be a technology VP at Archers Inc., developing PECVD process for Si thin film solar cells. She also has been a consultant and then the CTO at Solar Applied Materials during 2019-2012, leading an initiative to developing energy and advanced PV materials. In Jan. 2013, as a professor at NTHU-MSE, she is also on-leave as a VP at UMC, leading Customer Engineering first and then ATD focused on 28nm and 14nm FinFET till now. Her research focuses include advanced semiconductor processing & integration, nano-electronics, flexible electronics, nano/bio-materials, bio- sensing/imaging, and solar cells.

Her publications include 84 international journal papers and 95 conference papers covering nano-/bio- technologies and semiconductors. She holds 139 patents with 260 certificates granted. Honorary awards she received include “Outstanding Youth Award” in 1998, “Outstanding Youth Electronic Engineer Award” in 1999, “ROC National Invention Gold Medal Award” in 2000, and “Top 10 Distinguished Engineer Award in 2001” during 1998-2001, and “Outstanding Teaching Award” from Engineering College of NTHU in 2007 and 2011, “Outstanding Teaching Award” from NTHU in 2008 and 2012, “Outstanding Teacher Award” from Engineering College of NTHU in 2010, and ‘’ROC National Invention Silver Medal  Award’’ in 2015.

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