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The Future of Quality in CMP

Thursday, September 19
2:20pm to 2:45pm

Abstract:

As industry leaders continue to push Moore’s Law for both memory and logic device, the criticality of advancing quality in materials becomes a greater challenge for the industry and supply base to address. Formulated Products, specifically lithography materials, formulated cleans and CMP slurries, represent a greater challenge in this respect because of multiple raw materials utilized for a single formulation. As the industry pushes forward, the use of data analytics and predictive modeling will be critical to advancing the quality of these raw materials for enabling leading edge quality and excursion prevention.  Driving greater quality and supply management deeper into the raw material supply chain combined with predictive modeling is critical to manage product variability while balancing total cost of ownership.  In this presentation, we will share examples of how this approach can advance material quality for example raw materials.

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