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Dr. Dustin Ho

   

Dr. Dustin Ho

 

Technical Director        

        

200mm&Fab Environmental Solution, Applied Materials Inc.

 Education:

 

  • Ph.D. New Jersey Inst. Tech. USA

     

 Experiences:

 

  • Technical Director, Applied Materials

  • Marketing Director, Air Liquide

  • System Eng Manager, AKT/AMAT

  • Principle Engineer, BOC Edwards

 

 Biography:

 

  • Dustin Ho is currently Technical Director 200mm and  Fab Environmental Solutions, AGS/EPG, Applied Materials implementing innovative solutions for semiconductor process.

  • 2011 – 2014 he was Marketing Director and International Senior Expert of Air Liquide for new market development.

  • 2008-2010 he was Sr. System Eng. Manager of AKT Solar Division

  • 2003-2008 he joined DSM Applied Materials as Sr. MTS to develop Low-k and UV Chambers

  • 2000-2003 he was MTS of ESPD Applied Materials for emission technology program

  • 1996-2000 he worked for BOC Edwards as Principle Engineer for Electronic Materials development

  • Dustin Ho has published 20+ technical papers, 31 patents, and made numerous presentation at industry conference

 

 Speech Abstract:

 Safety and Particulate Management of Process Effluents

Advanced semiconductor process utilizes more and more exotic chemicals and exposes to Environmental, Safety, and Health (ESH) rick for Fab engineers. Equipment suppliers develop process chambers (CVD, Furnace, ALD etc.) mainly focus on thin film quality, functionality; wafer through put; and chamber uptime. Process effluent containing hazardous chemical, solid particulate will be treated by local scrubber at SubFab. Missing proper resolution in between.

This presentation will show an innovative solution using plasma pre-treatment technology to covert energetic byproducts into gaseous and/or stable solid final products resulting SubFab safety and PM cycle improvement. Pre-pump plasma units  are scalable solutions which provide a “plug and play” installation.

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