星 丈治 / Mr. George Hoshi


星 丈治 / Mr. George Hoshi


Sr. Manager


EHS Promotion Center, TEL



  • Musashi Institute of Technology, Tokyo, Japan




  • Sr. Manager of EHS promotion center

  • Group leader of  development & designing section of Thermal butch furnace




  • George Hoshi started business career at Tokyo Electron in 1991, and have continued work at TEL for lore than 25 years

  • He started as designing section for thermal batch furnace , and also development section of new equipment

  • After that, he joined to EHS promotion center and he is in charge of TF leader of SEMI S23


 Speech Abstract:

 SEMI Standard for Energy/Resource Use Efficiency ―Introduction of SEMI S23 Revision


SEMI S23, “Guide for Conservation Of Energy, Utilities and Materials Used by Semiconductor Manu-facturing Equipment”, was originally published in March 2005 and have been widely adopted by both semiconductor manufacturing equipment (SME) suppliers and users. Especially the concept of total equivalent equipment energy evaluation using conversion factor for various utilities has been consid-ered to be very useful tool to visualize energy and utilities used by semiconductor manufacturing equipment though material use was not addressed in the same manner.

It is noted, however, as the advancement of semiconductor device nodes requires different functionalities and process performance characteristics to SME, simple reduction of annual energy use or energy use rate (e.g. per area*time) becomes much more difficult if not impossible to achieve between old and new model of same type of SME.

Thus, S23 Global TF decided to update S23 to include process performance and productivity of SME into consideration and to provide guidance for how to measure and report “Energy/Resource Use Efficiency” of SME, for which current S23 provides little clue.

S23 revision will also harmonize concepts and definitions regarding SME operation modes with related SEMI communication Standards that enable synchronization of equipment energy saving operation capabilities with factory operation and with subsystem (e.g. pumps, abatement system) energy saving operation capabilities.

It is recognized there are more items to be included to further improve the Standard in the future. One of such item is inclusion of chemical use into total equivalent equipment energy use consideration.


This presentation will detail major points of current S23 revision activity in relation to some challenges that are faced by the industry.


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