林本堅 / Dr. Burn J. Lin



林本堅 / Dr. Burn J. Lin


Distinguished Research Chair Professor


Electrical Engineering Department, National Tsing Hua University



  • Ohio State University   Ph. D. Elec. Eng. 1970

  • National Taiwan University B.S. Elec. Eng. 1963




  • 47 years in Lithography R&D, at TSMC, Linnovatoin, and IBM

  • Member, US NAE; Academician, Academia Senica

  • Fellow: IEEE, SPIE

  • One book, 3 book chapters, 133 papers, 88 US patents

  • Awards from IEEE, SPIE, TSMC, IBM and many others




  • Innovations are always wanted, even more so now for the semiconductor industry. We are now facing the tradeoff of scaling against economy, which no longer complement each other. We need innovations on how to sustain the growth of the industry, despite the success or failure of further scaling. Innovations are wanted for scaling and for visions beyond scaling.





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