Mr. Albert Chen

Director, Advanced Technology Engagement
Entegris, Inc.


  • M.S. in Engineering & Management, MIT
  • M.S. in Chemical Engineering, NCKU


  • Director, Advanced Technology Engagement, Entegris
  • RD Manager, Entegris
  • Technical Manager, TSMC


•Albert Chen serves as the Director for advanced technology engagement under the CTO office in Entegris. In his capacity, he is responsible for engaging with advanced customers and developing technology roadmaps, especially in the wet etch and clean area. He also oversees the integration and the development of Entegris Taiwan Technology Center on behalf of the CTO office.

•He joined Entegris in 2014 as the RD manager for the Micro Contamination Division and migrated to current position in 2015. Prior to that, Chen served as the Technical Manager in TSMC leading or participating in projects to improve defects/micro contaminations in wet etch & clean, photolithography and CMP areas. He was also responsible for collaborating with academia and other industrial institutes in developing new inspection and metrology tools to support the new nodes. He is the founding member of SEMI Taiwan Inspection & Metrology Committee.

•With over 20 years of experience in sales, marketing, R&D, and manufacturing for the semiconductor industry, Chen now focuses on synergizing the material, micro contamination control and inspection & metrology capabilities inside Entegris.


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