White-Light Interferometry Integration with Electromagnetic Simulation and Digital Light Field Control for Advanced Packaging

10:40 am - 11:20 am

White-light interferometry is a representative optical non-destructive metrology technique that is widely used in various industrial applications. However, as measurement targets become increasingly challenging, additional techniques such as accurate simulation and system modeling are required to ensure its continued applicability and to further explore its potential for measuring complex 3D structures in advanced packaging. To this end, Chroma has been actively investigating relevant topics with the aim of advancing optical metrology.

Key Technologies Covered

  • White-light interferometry (coherence scanning interferometry)
  • Electromagnetic Simulation
  • Digital Light Field Control
  • Model based metrology

Featured Speakers

Mr. Guo-Wei Wu

Dr. Guo-Wei Wu

Technical Supervisor, Advanced Technology Research Center, Chroma ATE

Evan Wu, Ph.D., received his doctorate in Mechanical Engineering from National Taiwan University, specializing in optical metrology, simulation, and related data processing techniques. He values interdisciplinary integration and solution-oriented applications. He is currently a Technical Supervisor at Chroma ATE Inc., responsible for innovative optical technology research and development.