Progress of on-line monitoring system for advanced process of semiconductor industry

2:10 pm - 2:50 pm
  • Introduce the differences in monitoring strategies between traditional chemical industries and semiconductor industries.
  • Through a case study of an aluminum etching process control, illustrate the monitoring strategies required in the semiconductor industry.
  • Progress of on-line monitoring system in Atlas group
  • Conclusion
  • Q&A

Featured Speakers

Mr. Simen Lai

Dr. Simen Lai

CTO, General Manager’s Office, Atlas Technology Corp.

After graduating from National Tsing Hua University in Taiwan, Dr. Lai immediately joined the Industrial Technology Research Institute, where he conducted research on volatile organic compounds (VOCs) monitoring and treatment technologies. He has over 20 years of professional experience and has served as the head of the R&D department for 14 years. Since the Environmental Protection Administration of Taiwan began promoting VOCs control work in 1990, Dr. Lai has assisted the EPA in drafting emission standards for various industries including semiconductor, optoelectronics, synthetic leather, and adhesive tape industries. Currently, he serves as a reviewer for the EPA's continuous automatic monitoring project and indoor air quality project.