Mr. Chao-pei Lu

Education

• Master of Mechanical Engineering, NTU

Experience: 

• Director of PDC TCT , Applied Materials (2024/Jun - Now) 
• Manager of TSID, TSMC (2017/Apr – 2024/May) 
• Manager of GSC, ASML (2008/Mar – 2017/Mar) 

Patent: 

• Method for improving exposure performance and apparatus thereof (PPN:20200133142) 
• Method for controlling read velocity in a disk device (PPN: 20060233056) 

Biography:

CHAO-PEI (Perry) Lu, is a director at Applied Materials with extensive experience in semiconductor process, equipment, and advanced manufacturing technology. In this role, he is responsible for engineering management, technology development, digital transformation initiatives, or manufacturing excellence. With a strong background spanning 20+ years in the semiconductor and related industries, Perry has led and contributed to initiatives across areas such as smart manufacturing, data-driven operations, Industry 4.0, automation, process optimization, and cross‑functional collaboration between manufacturers and suppliers.  

He has worked closely with global customers and partners to drive improvements in productivity, quality, cost, and sustainability. To participate in the SEMI Smart Manufacturing Committee, Perry is anxious to  contribute industry insights and practical perspectives to support SEMI’s mission of advancing smart manufacturing programs, events, and ecosystem collaboration. He is particularly interested in the areas like manufacturing digitalization, standards alignment, AI transformation, and supply‑chain resilience, with the goal of fostering innovation and long‑term growth across the global semiconductor ecosystem.