Deputy Division Director, Semiconductor Instrumentation and Metrology Division, Industrial Technology Research Institute
Dr. Fang-Hsin Lin joined the Center for Measurement Standards (CMS) of the Industrial Technology Research Institute (ITRI) in 2015 as a metrologist and currently serves as the Deputy Division Director of the Semiconductor Instrumentation and Metrology Division at CMS/ITRI. She has contributed to the development of nanometrology and chemical metrology-related techniques and instrumentation and has actively participated in international activities within APMP TCMM and VAMAS. Her research primarily focuses on particle and ultra-trace impurity analysis in raw materials for the semiconductor industry.
Dr. Lin received her Ph.D. in Biomedical Engineering and Environmental Sciences from National Tsing Hua University in 2012.
