傅尉恩博士

Wei-En Fu received his bachelor in Mechanical Engineering at the National Cheng Kung University, Taiwan, in 1990. He later obtained his PhD in Industrial and Manufacturing Engineering from the Pennsylvania State University, US, in 2003. Currently, he is Deputy General Director of the Center for Measurement Standards (CMS) at the Industrial Technology Research Institute (ITRI). With a diverse background in both mechanical and industrial engineering, he has been involved, coordinated and principal-investigated projects in nanometrology and semiconductor metrology in CMS/ITRI. His research activities focus on the development of X-Ray Metrology, Thin Film Metrology and Nanometrology for the advance semiconductor manufacturing processes, particularly in the fields of Critical Dimensions Small Angle Scattering and X-Ray Reflectivity in Semiconductor Metrology.