Closing the Loop: A Circular Pathway for High-Quality Electrolytes

下午 3:50 - 下午 4:10

Founded in 1984 as a wholly owned subsidiary of Tama Chemicals, Moses Lake Industries, Inc. (MLI) is a trusted global supplier of high-performance chemical solutions for the semiconductor industry. MLI started in the industry by providing TMAH for lithography and etching/cleaning applications and in the 1990s expanded to providing chemicals, both electrolytes (VMS) and organic additives, for plating applications for Damascene (BEOL), TSV, and Advanced Packaging. With the increasing need and use for semiconductor chips (AI), demand for these specialty chemicals is also expected to increase. MLI has been studying how to implement and improve the recycling of chemicals in semiconductor manufacturing, and we will present our findings. Specifically, we will share our approach in recycling copper from copper plating baths back to semiconductor grade electrolyte.

Key Technologies Covered

Reduction of carbon footprint
Improve interconnect metallization processes
Suitability improvement

Featured Speakers

Mrs. Katie Lingscheit

Research and Development Manager, Moses Lake Industries, Inc.

The first year of my professional career was spent as a Quality Control Chemist at TCI, Portland, Oregon, USA. I transitioned to MLI where I began learning the fundamentals of electroplating/electrodeposition. Most of my career at MLI has been focused on the development of chemical packages for copper Damascene applications. The past 2 years have been primarily focused on managing the research, implementation, and feasibility of creating a circular life cycle for the copper raw material in electrolyte.