Smart Automation: Accelerating S/TEM defect analysis and metrology efficiency

9:10 am - 9:50 am

Thermo Fisher is presenting our recipe-free full automation, known as Smart Automation, leveraging advanced machine-learning algorithms to significantly reduce the time required for recipe development across various processes and sample types. This innovative approach eliminates the need for manual recipe creation by utilizing machine learning to automate the setup and execution of complex workflows. Smart Automation includes features such as automatic Region of Interest (ROI) identification, template-based instruction sets, and guided-to-full automation transitions. These capabilities ensure high-quality, repeatable results while minimizing operator intervention and skill dependency. By integrating machine learning models for tasks such as feature recognition, zone axis alignment, and defect analysis, Smart Automation enhances the efficiency and accuracy of semiconductor manufacturing processes.

Key Technologies Covered

Recipe-Free full automation
Machine-Learning integration
Guided-to-Full Automation Transitions
High-Quality Data and Robustness
Application-Specific Automation

Featured Speakers

Mr. Tony Tsai

Field Application Engineer, Materials Structural Analysis Division, Thermo Fisher Scientific

I am currently an Application Engineer at Thermo Fisher Scientific, specializing in Transmission Electron Microscopy (TEM) and TEM automation technologies. In my role, I am responsible for developing and implementing advanced TEM solutions that enhance scientific research and industrial applications. With a strong background in engineering and a deep understanding of electron microscopy, I collaborate with research scientists and technical teams to design, optimize, and troubleshoot TEM systems. My expertise ensures that Thermo Fisher's TEM products meet the highest standards of performance and reliability. Beyond my professional duties, I enjoy staying updated with the latest advancements in TEM technology and exploring new applications in various fields. I am also dedicated to continuous learning and professional development, attending workshops and conferences to enhance my skills and knowledge. My passion for innovation drives me to seek out new challenges and opportunities to contribute to the scientific community.