Smart Automation: Accelerating S/TEM defect analysis and metrology efficiency
Thermo Fisher is presenting our recipe-free full automation, known as Smart Automation, leveraging advanced machine-learning algorithms to significantly reduce the time required for recipe development across various processes and sample types. This innovative approach eliminates the need for manual recipe creation by utilizing machine learning to automate the setup and execution of complex workflows. Smart Automation includes features such as automatic Region of Interest (ROI) identification, template-based instruction sets, and guided-to-full automation transitions. These capabilities ensure high-quality, repeatable results while minimizing operator intervention and skill dependency. By integrating machine learning models for tasks such as feature recognition, zone axis alignment, and defect analysis, Smart Automation enhances the efficiency and accuracy of semiconductor manufacturing processes.
Key Technologies Covered
- Recipe-Free full automation
- Machine-Learning integration
- Guided-to-Full Automation Transitions
- High-Quality Data and Robustness
- Application-Specific Automation
