Panel-Level Packaging Challenges and Innovations in Lithography, Inspection, and Metrology

下午 2:40 - 下午 3:05

Panel-level packaging (PLP) is rapidly emerging as a key enabler of next-generation semiconductor manufacturing, offering significant advantages in scalability, integration density, and cost efficiency. As the industry pushes toward finer nodes and more complex system architectures, PLP is not only transforming chip packaging—it is also reshaping the design of semiconductor equipment.

Scaling PLP introduces challenges in warpage control, die placement accuracy, and achieving process uniformity across large formats. The integration of glass substrates—with their superior dimensional stability, low dielectric loss, and fine-line capability—offers promising solutions, but also presents new hurdles in handling, via formation, and process integration. Overcoming these challenges requires continued innovation in materials and packaging design.

This presentation will focus on how lithography, inspection, and metrology platforms are evolving to meet the demands of PLP. We will highlight key innovations in these areas and the importance of process control in enabling more precise, reliable, and scalable PLP solutions.

Key Technologies Covered

Panel lithography with large field stepper
Panel inspection system with integrated 3D metrology capabilities
Process control for panel level packaging and glass core substrate applications

Featured Speakers

Dr. Monita Pau

Strategic Marketing Director, Corporate Marketing, Onto Innovation

Monita Pau is currently Strategic Marketing Director for Advanced Packaging at Onto Innovation. She leads the development of collaborative initiatives to drive growth and innovation. With over 15 years of experience, her expertise spans across frontend and backend of line process control solutions as well as specialty materials for advanced packaging and assembly. Prior to joining Onto, she held various positions in applications engineering, marketing and strategic business development at DuPont and KLA. Monita holds a Ph.D. degree in Chemistry from Stanford University.